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3	"On Spectroscopic Ellipsometry" On Spectroscopic Ellipsometry
4	"Light waves are electromagnetic in..." Light waves are electromagnetic in nature and require four basic field vectors to completely describe them. The electric-field strength: E The electric-displacement density: D The magnetic-field strength: H and The magnetic-flux density: B Of these four vectors, the electric-field strength is chosen to describe the polarization state of light waves. It is because the force exerted on the electrons by E is much greater than by the magnetic-filed of the wave when light interacts with matter. Once the polarization of electric-field vector has been determined, the other three vectors can be also determined based on Maxwell’s field equations and the associated constitutive material relations.
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15	"Instrumentation" Instrumentation
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23	"On Spectroscopic Ellipsometry" On Spectroscopic Ellipsometry Modeling
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27	"M films in structure" M films in structure Planar assumed Isotropic and homogenous Incident angle known
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48	"with Spectroscopic Ellipsometry" with Spectroscopic Ellipsometry
49	"Optical constants or dielectric constants..." Optical constants or dielectric constants for bulk materials Optical constants and thickness for films Surface, Interface and Composites Alloy concentration determination Real time monitoring for growth or etching kinetics study Band gaps Porosity
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55	"Ellipsometry is a technique through..." Ellipsometry is a technique through monitoring the polarization state changes. It offers nondestructive way to accurately determine film thickness and optical constants Many types of ellipsometers are available in the market. The selection and use of ellipsometer are highly application-oriented. SE has advantages over many other techniques. The ellipsometry is the MODEL based technique. It is not direct readout type instrument. Therefore: It is critical to use the right model to get right results
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58	"www.angstec.com" www.angstec.com Info@angstec.com Phone: (978) 263-6678 Fax: (978) 263-6675