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Drude model used to describe dielectric behaviors for metals was applied in this analysis for WCx film. Its expression could be written as follows:
where A is the polarization, B is the damping related constant and C is the inverse of the plasma wavelength.
In addition, two absorption bands with Lorentz function were added to Drude model. The dielectric constants of each band (m=1 and 2) are calculated with the expressions:
where A, lo and g are the intensity, the central wavelength and the width of the band respectively. Total dielectric function will be the sum of the different terms from each band.