Dual Channel SRT System for Simultaneously Measuring Reflection, Transmission Spectra & Film Thickness

• Features

• System Configurations

• Specifications

• Options

• Applications                                     

• More Information

· Easy to set up

· Easy to operate with Window based software

· Advanced optics design for best system performance

· Array based detector system to ensure fast measurement

· Measure film thickness and Refractive Index up to 5 layers

· Allow to acquire reflection and transmission spectra simultaneously on the exact same spot in just milliseconds 

· Dual Channel spectrometer system with wide wavelength range coverage

· System comes with comprehensive optical constants database and library

· Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.

· Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system, Multiple channel system, Large Spot for · direct measurement over patterned or featured structure

· Apply to many different type of substrates with different thickness

· 2D and 3D output graphics and user friendly data management interface

· Model: SRT100

· Detector: Dual Channel CCD Array each with 2048  pixels

· Light Source: Combined High Power Deuterium and Halogen

· Light Delivery: Fiber Optics

· Stage: Black Anodized Aluminum Alloy with Easy Adjustment for sample height, 100mmx100mm size

· Communication: USB with computer

· Measurement Type: Film thickness, reflection spectrum, transmission spectrum, refractive index

· Software: TFProbe 2.3

· Computer needed: P3 above with minimum 50 MB space

· Power: 110– 240 VAC /50-60Hz, 1.5 A

· Warranty: One year labor and parts

· Wavelength range: 250 to 1100 nm

· Spot Size: 500 µm to 5mm

· Sample Size: 100x100mm or 100 mm in diameter

· Substrate Size: up to 50mm thick

· Measurable thickness range^*: 5 nm to 50 µm

· Measurement Time: 2 ms minimum

· Accuracy^*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)

· Repeatability^*: < 1 Ǻ (1 sigma from 50 thickness readings for 1500 Ǻ Thermal SiO2 on Si Wafer)

· Further DUV or Near Infrared wavelength range extension

· Micro spot for measuring small area down to 5 µm size

· Semiconductor fabrication (PR, Oxide, Nitride..)

· Liquid crystal display (ITO, PR, Cell gap…..)

· Forensics, Biological films and materials

· Inks, Mineralogy, Pigments, Toners

· Pharmaceuticals, Medial Devices

· Optical coatings, TiO₂, SiO₂, Ta₂O₅…..

· Semiconductor compounds

· Functional films in MEMS/MOEMS

· Amorphous, nano and crystalline Si

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.