TFProbe^® Software Version 2.0 for Thin Film, Spectroscopy and Digital Imaging Applications  - Spectroscopic Reflectometer and Microspectrophotometer

TFProbe^® Software Version 2.0 for Thin Film, Spectroscopy and Digital Imaging Applications

    1. Features

    2. Interface Examples

    3. Applications

    4. Application Examples

    5. More Information

Easy to operate under Window operating systems

Support and communicate with various type of CCD based array detector systems

Measure film thickness and optical constants (N & K) up to 5 layers

Allow to acquire reflection, transmission and absorption spectra in milliseconds 

Capable to be used for real time or in-line thickness, refractive index monitoring

Comes with comprehensive optical constants database and library

Advanced optical constants editor

Allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film or substrate.

Support MSP (Microspectrophotometer) system with vision integration, SRM Mapping system, Multiple channel system

Run simulation on reflection, transmission and optical constants

Perform simulation or measurement at non normal incident angles

Various data output options

2D and 3D graphic presentation

Support RS232 Communication with Host Controller

Auto log functions for spectrum, measured results and fitting graphs

Save fitting graphs as image for easy presentation

Backside reflection correction in the model for measuring film on transparent substrates.

Simulation on reflection, transmission spectra for layer stacks

Measure film thickness and optical constants

Vision, spectra, mapping and micron spot setup

Real time monitoring and patterned structure

Optical Constants database and management

1. Measured thicknesses for three layers Nitride-Oxide-Nitride on Glass

2. Measured Transmission for Color Pixels                                                             Top

3. Mapped Thickness 2D Plot                                                                               Top

4. Real Time Monitored Thickness Changes                                                          Top

5. Vision and Film Thickness Measurement Capability for Small Spot                        Top

6. Optical Constants Library                                                                                  Top

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.