Accessories for TFProbe Reflectometer, Microspectrophotometer and Ellipsometers

• Digital Camera for Microspectrophotometer

• Optical Setup for Microspectrophotometer

• Transmission and absorption measurement fixture

• Reference samples for reflection measurement

• Film Thickness Standards

• DIAS 2.0 Digital Image Analysis Software

• Stages for Reflection Measurement

• Larger Spot for Patterned Structure Measurement

• Fixture for Curved Surface Measurement

            You can adapt these cameras to the eyepiece tube or photo port (if any) in your any existing model microscopes so that you can convert your conventional microscope to the digital imaging microscope without need to stick your eyes on microscope all the time. This is cost effective solution to upgrade your lab tools with an excellent imaging quality for professional presentations. Optional advanced image analysis software provides various tools for image and video capturing, editing and measurements.

Optical Setup for Microspectrophotometer                                                         Top

        You can convert your own microscope to an advanced microspectrophotometer by adapting our optical setup fixture. With this setup, you are able to view, select and acquire reflection, transmission and/or absorption spectra over small sampling area. It is also feasible to measure film thickness over the patterned or featured samples.

• Option 1: Optical Setup only

• Option 2: Digital Imaging System and Software DIAS2.0

• Option 3: Spectrometer

• Option 4: TFProbe Data Acquisition and Analysis Software

• Option 5: Digital Imaging Microscope

• Option 6: Any Combination of Above Options

TFProbe reflectometer is used for reflection and film thickness measurement. With the transmission and absorption fixture, user can set up the reflectometer system to run transmission and absorption measurement with the same set of spectrometer and light source.

Reference samples for reflection measurement                              Top

          Reference is necessary for reflection measurement. We provide two types of reference. One is glass type and the second is semiconductor type. The size for each type varies and it can be ordered based on specific reflectometer system and applications. Accurate optical constants (N & K) covering wide wavelength range will be provided with reference.

           We provide low cost film thickness standards with different nominal thicknesses from 300 angstrom to 2 microns. Standards are thermally grown silicon dioxide film on silicon substrate with size from 2" to 12" in diameter. Both film thickness and refractive indices are accurately determined with advanced spectroscopic ellipsometry technique, instead of at fixed refractive index. We'll offer detailed, certified data sheets for all standards. Please contact us for more details.

            Digital Image Analysis Software Version 2.0 is a 24 bits real color microscopy image processing software which is developed based on experience of many years in the field of digital image processing and analysis. DIAS2.0 provides a large number of image processing and measurement tools and it is suitable for all kinds of image processing and measurement tasks. Easy-to-use and user-friendly interface as well as reliable performance will ensure you to achieve your goals in scientific and research fields.

• Made from aluminum alloy and black anodized

• Easy height adjustment mechanism

• Hold 200mm wafers with markers for various size substrates

• UV-Vis or Visible achromatic optics assembly

• Up to 50mm Measurement Beam Size

• UV-Vis or Visible optics assembly

• SMA905 Fiber Optics Input

• Used for Lager Area Film Thickness Measurement over Patterned Wafer

• Application Example available for CMP processing in-line Monitoring

• Used to run thickness measurement over curved surfaces

• Easy adjustment on distance between sample surface and probe tip

• Applications for glasses and goggles

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.