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Product Overview: |
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Functions |
Spectroscopic |
Spectroscopic |
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| Wavelength Range | 190 to 1700 (or 2300) nm | 190 to 1700 (or 2300) nm | 190 nm to 30 µm | ||||||||||||||||||||||||||||
| Measurable Parameters | Film Thickness | 20Å to 250µm | 20Å to 50µm | 10Å to 10µm | |||||||||||||||||||||||||||
| Optical Constants | N & K | N & K | N & K | ||||||||||||||||||||||||||||
| R/T/A | Yes | Yes | |||||||||||||||||||||||||||||
| Geometry | Yes | ||||||||||||||||||||||||||||||
| Digital Imaging | Yes | ||||||||||||||||||||||||||||||
| Main Features | Low Cost, Fast Measurement, Wide Dynamic Range | Down to 5 um Spot Size on any Patterned Structure | Complicated Layer Stack | ||||||||||||||||||||||||||||
| Options | Wavelength Extension, Mapping Stage, Heating/Cooling Stage | ||||||||||||||||||||||||||||||
| Unique Options | Large Spot Set up for In-Line Metrology Applications | Raman & Fluorescence Add-on Set-ups and optional smaller spot size | |||||||||||||||||||||||||||||
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| Copyright ©2002 - 2009 Angstrom Sun Technologies, Inc. All Rights Reserved Last modified: November 18, 2009 |