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Ellipsometer_Reflectometer_Overview

Ellipsometer_Reflectometer_Models

Ellipsometer_Reflectometer_Guide

Spectroscopic Ellipsometer
Spectroscopic Ellipsometer SE200BA
Spectroscopic Ellipsometer SE200BM
Spectroscopic Ellipsometer SE200-MSP
Spectroscopic Ellipsometer SE200AA

Spectroscopic Ellipsometer SE200AM

Microspectrophotometer

Microspectrophotometer MSP100

Microspectrophotometer MSP300

Microspectrophotometer MSP500

Spectro Reflectometer

Spectroscopic Reflectometer SR100

Spectroscopic Reflectometer SR300

Spectroscopic Reflectometer SR500

Spectroscopic Reflectometer SR Mapping System

Spectroscopic Reflectometer SRM100-300

Spectroscopic Reflectometer SRM300-300

TFProbe Software

TFProbe 2.0

TFProbe 3.0

Spectroscopic Reflectometer In-Line Metrology

Accessories

 

MSP300 Microspectrophotometer and Film Thickness Measurement System

Introduction:

Microspectrophotometry (Micro-Photometry, Micro Spectrophotometry) is used to characterize optical properties of thin films, thick coatings over a micron region area. Microspectrophotometer is also called microreflectometer, micro-reflectometer, microspectrometer, microphotometer (Spectroscopic), microspectroscopic photometer etc. With unique design by Angstrom's professionals, user can enjoy digital imaging capability in Microspectrophotometers (MSP series) by live video, powerful digital editing, measurement tools for reflection, transmission, absorption spectra. Data acquisition only takes milliseconds. TFProbe software allows user to set up heating stage or cooling stage for kinetic study in real time for optical property changes such as reflectance, transmittance, coating thickness, refractive index (optical constants) etc. Automatic mapping function is also available in various Microspectrophotometer models with motorized X-Y stage or Rho-Theta Stage and also motorized focus function using Joystick. Wavelength range usually is an important factor for user to consider. Angstrom's microspectrophotometer covers from deep-ultraviolet (DUV) to near-infrared (NIR) ranges. Which range should be considered will depend on several factors such as what are thickness ranges for thin film or thick coating, what is typical wavelength range of interest for reflectance or transmittance and so on.

Features:

 Easy to operate with Window based software

 Advanced optics and rugged design for highest uptime and the best system performance

 Array based detector system to ensure fast measurement

 Affordable, portable and small footprint table top design

 Measure film thickness and Refractive Index up to 5 layers over micron size region

 Allow to acquire reflection, transmission and absorption spectra in milliseconds 

 Capable to be used for real time spectra, thickness, refractive index monitoring

 System comes with comprehensive optical constants database and library

 Advanced Software allows user to use either NK table, dispersion or composite model (EMA) for each individual film

 Integrated Vision, spectrum, simulation, film thickness measurement system

 Apply to many different type of substrates with different thickness up to 200mm size

 2D and 3D output graphics and user friendly data management interface

 Advanced Imaging software for dimension measurement such as angle, distance, area, particle counting and more

 Various options available to meet special applications

System Configuration:

 Model: MSP300R

 Detector: CCD Array with 2048  pixels

 Light Source: DC regulated Halogen lamp

 Stage: Black Anodized Aluminum Alloy with manually adjustable travel distance 150mm by 150mm

 Long Working Distance Objectives: 4x, 10x, 50x

 Communication: USB

 Measurement Type: Reflection/Transmission spectra, Film thickness/refractive index and feature dimensions

 Computer:  Intel Core 2 Duo Processor with 200GB Hard drive and DVD+RW Burner plus 19 LCD Monitor

 Power: 110 240 VAC /50-60Hz, 3 A

 Dimension: 16x16x18 (Table top setup)

 Weight: 120 lbs total

 Warranty: One year labor and parts

Specifications:

 Wavelength range: 400 to 1000 nm

 Wavelength Resolution: 1nm

 Spot Size: 100m (4x), 40m (10x),, 8m (50x)

 Sample Size: 150x150mm standard

 Substrate Size: up to 20mm thick

 Measurable thickness range*: 10 nm to 25 m

 Measurement Time: 2 ms minimum

 Accuracy*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)

 Repeatability*: < 2 Ǻ (1 sigma from 50 thickness readings for 1500 Ǻ Thermal SiO2 on Si Wafer)

Options:                                                                                                                      Top

 Wavelength extension to DUV (MSP100) or NIR range (MSP500)

 Higher power optics for smaller spot size

 Customized configuration for special applications

 Heating and Cooling Stage for dynamic study

 Optional stage size holding samples up to 300mm

 Higher wavelength range resolution down to 0.1nm

 Various filters for special applications

 Add-on accessories for fluorescence measurement

 Add-on accessories for Raman applications

 Add-on accessories for polarizing applications

 Automatic Mapping Stage up to 300mm wafer

Applications:                                                                                                               Top

 Semiconductor fabrication (PR, Oxide, Nitride..)

 Liquid crystal display (ITO, PR, Cell gap..)

 Forensics, Biological films and materials

 Inks, Mineralogy, Pigments, Toners

 Pharmaceuticals, Medial Devices

 Optical coatings, TiO2, SiO2, Ta2O5..

 Semiconductor compounds

 Functional films in MEMS/MOEMS

 Amorphous, nano and crystalline Si

Application Examples:                                                                                              Top

1. Measured Transmission Spectra for Color Pixels

2. Measured Film Thickness of TiO2 on Silicon

3. Measured Reflection Spectra over a MEMS Device Inside/Outside a Via-hole

4. Digital Imaging Function in MSP300 System

Note:

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.