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Overview

Models

Guide

Spectroscopic Ellipsometer
SE200BA
SE200BM
SE200-MSP
SE200AA

SE200AM

Microspectrophotometer

MSP100

MSP300

MSP500

Spectro Reflectometer

SR100

SR300

SR500

SR Mapping System

SRM100-300

SRM300-300

TFProbe Software

TFProbe 2.0

TFProbe 3.0

In-Line Metrology

Accessories

 

Integrated Solution for In-Line Film Thickness Monitoring with Spectroscopic Reflectometer

Features

System Configuration

Specifications

Options

Applications

More Info

Features:

 Low cost

 Easy to set up

 Easy to operate with Window based software

 Advanced optics design for best system performance

 Array based detector system to ensure fast measurement

 Uniquely designed light source for better intensity stability

Real time or in-line Monitoring film thickness and Refractive Index up to 5 layers

 Multiple Channel/Multiple Sites Simultaneous Measurement

 System comes with comprehensive optical constants database and library

 Configurable to MSP (Microspectrophotometer) system, SRM Mapping system

 Apply to many different type of substrates with different thickness

 RS232 Protocol for Host Control

 Auto log spectrum, thickness results and fitting graphs

 Advanced Global ZR model allows to extract local desired information from Large Spot Area Measurement over the patterned structure such as IMD, ILD1, ILD3 etc.

System Configuration:

 Wavelength range: 400 to 1000 nm

 Spot Size: 500 m to 20mm

 Sample Size: Any

 Substrate Size: Any

 Measurable thickness range*: 20 nm to 50 m

 Measurement Time: 2 ms minimum

 Accuracy*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)

 Repeatability*: < 1 Ǻ (1 sigma from 50 thickness readings for 1500 Ǻ Thermal SiO2 on Si Wafer)

Options:                                                                                                                     Top

 Transmission Mode

 Micro spot for measuring small area down to 5 m size

 Multiple Channel for simultaneously measurement at multiple locations

 Motorized X-Y Stage

 Other wavelength range coverage from DUV to IR

 Customized design or modification to fit specific application

 

Applications:                                                                                                             Top

 Semiconductor fabrication (PR, Oxide, Nitride..)

 Liquid crystal display (ITO, PR, Cell gap..)

 Solar Cell industry

 Inks, Mineralogy, Pigments, Toners

 Pharmaceuticals, Medial Devices

 Optical coatings, TiO2, SiO2, Ta2O5..

 Semiconductor compounds

 Functional films in MEMS/MOEMS

 Amorphous, nano and crystalline Si

More Info:                                                                                                            Top

Please contact us.

Note:

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.