SR500 Spectroscopic Reflectometer & Film Thickness Measurement System

• Features

• System Configurations

• Specifications

• Options

• Applications

• Application Examples

• More Information

· Easy to set up

· Easy to operate with Window based software

· Advanced optics design for best system performance

· Array based detector system to ensure fast measurement

· Measure film thickness and Refractive Index up to 5 layers

· Allow to acquire reflection, transmission and absorption spectra in milliseconds 

· Capable to be used for real time or in-line thickness, refractive index monitoring

· System comes with comprehensive optical constants database and library

· Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.

· Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system, Multiple channel system, Large Spot for · direct measurement over patterned or featured structure

· Apply to many different type of substrates with different thickness

· Various accessories available for special configurations such as running measurement over the curve surface

· 2D and 3D output graphics and user friendly data management interface

· Model: SR500R

· Dual Detectors: CCD Array for UV-Vis and InGaAs Detector Array for Near-Infrared (NIR)

· Light Source: Combined Deuterium and Halogen

· Light Delivery: Fiber Optics

· Stage: Black Anodized Aluminum Alloy with Easy Adjustment for sample height, 200x200mm size

· Software: TFProbe 2.2

· Communication: USB

· Measurement Type: Film thickness, reflection spectrum, refractive index

· Computer needed: P3 above with minimum 50 MB space

· Power: 110– 240 VAC /50-60Hz, 1.5 A

· Warranty: One year labor and parts

· Wavelength range: 250 to 1700 nm

· Spot Size: 500 µm to 5mm

· Sample Size: 200x200mm or 200 mm in diameter

· Substrate Size: up to 50mm thick

· Measurable thickness range^*: 2 nm to 150 µm

· Measurement Time: 2 ms minimum

· Accuracy^*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)

· Repeatability^*: < 1 Ǻ (1 sigma from 50 thickness readings for 1500 Ǻ Thermal SiO2 on Si Wafer)

· Transmission Fixture for Transmission and Absorption Measurement (SR500RT) 

· Micro spot for measuring small area down to 5 µm size (MSP500) 

· Multiple Channel for simultaneously measurement at multiple locations (SR500xX)

· Mapping uniformity over 200 or 300 mm wafer (SRM500-200 /300) 

· Semiconductor fabrication (PR, Oxide, Nitride..)

· Liquid crystal display (ITO, PR, Cell gap…..)

· Forensics, Biological films and materials

· Medial Devices

· Optical coatings, TiO₂, SiO₂, Ta₂O₅…..

· Semiconductor compounds

· Functional films in MEMS/MOEMS

· Amorphous, nano and crystalline Si

Please contact us for application notes.

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.