TFProbe^® Software Version 3.0 for Spectroscopic Ellipsometry: Simulation, Data Acquisition and Analysis

          1. Features

          2. Specifications

          3. Interface Examples

          4. Application Examples

          5. More Information

· Operating systems:  Win 98, Win NT, Win 2000, Win XP and Win Vista

· Functions: Simulation, Hardware Configuration and Calibration, Data Acquisition, and Regression

· Application: Photometry and Ellipsometry

· Layer Numbers: Unlimited

· Layer Type: NK Table, dispersion. Interface, surface roughness, EMA mixture

· Algorithm: Levenberg-Marquardt or Simplex

· Computer requirement:  2.0GHz Intel or AMD Processor, 512MB RAM and 30Mb free Hard drive space

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.