TFProbe^® Software for Thin Film, Spectroscopy and Digital Imaging Applications 

TFProbe^® Software Version 2.0

TFProbe^® Software Version 3.0

• Features

• Function Table

• Applications                                                        

• Application Examples

  • Thickness Measurement by SR

  • Transmission Spectra of Color Pixel by MSP

  • Mapped Thickness by SRM

  • Real Time Monitored Thickness Changes

  • Vision and Thickness Measurement by MSP

  • Optical Constants Database and Editor

• Easy to operate under Window operating systems

• Support and communicate with various type of CCD based array detector systems

• Measure film thickness and optical constants (N & K) up to 5 layers

• Allow to acquire reflection, transmission and absorption spectra in milliseconds 

• Capable to be used for real time or in-line thickness, refractive index monitoring

• Comes with comprehensive optical constants database and library

• Advanced optical constants editor

• Allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film or substrate.

• Support MSP (Microspectrophotometer) system with vision integration, SRM Mapping system, Multiple channel system

• Run simulation on reflection, transmission and optical constants

• Perform simulation or measurement at non normal incident angles

• Various data output options

• 2D and 3D graphic presentation

• Support RS232 Communication with Host Controller

• Auto log functions for spectrum, measured results and fitting graphs

• Save fitting graphs as image for easy presentation

• Backside reflection correction in the model for measuring film on transparent substrates.

TFProbe^® Version

1.0

2.2

2.2V

2.2M

2.2R

2.3

3.0

4.0D

4.0V

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• Simulation on reflection, transmission spectra for layer stacks

• Measure film thickness and optical constants

• Vision, spectra, mapping and micron spot setup

• Real time monitoring and patterned structure

• Optical Constants database and management

1. Measured thicknesses for three layers Nitride-Oxide-Nitride on Glass

2. Measured Transmission for Color Pixels                                                             Top

3. Mapped Thickness 2D Plot                                                                               Top

4. Real Time Monitored Thickness Changes                                                          Top

5. Vision and Film Thickness Measurement Capability for Small Spot                        Top

6. Optical Constants Library                                                                                  Top

1. System configuration and Specifications subject to change without notice

2. * Film property, surface quality and layer stack dependent

3. Customized system available for special applications

4. TFProbe is registered trademark of Angstrom Sun Technologies Inc.