- Product Showcase
- Spectroscopic Reflectometer SR Series
- Spectroscopic Ellipsometer SE Series
- Microspectrophotometer MSP Series
- Film Thickness Mapping System
- Integrated In-line Metrology
- TFProbe Software
Spectroscopic reflectometer mapping (SRM) tools are for industry or lab routine thin film uniformity measurement. This is relatively low cost and easy to use setup. Mapping size can be configured from 2" to 18" if needed. Dependent on film thickness range, a broad wavelength range can be configured within DUV, Vis and/or NIR range. A user-friendly software interface allows you to define various mapping patterns to map. A CCD array based detecting and data acquisition mechanism offers fast measurements. 2D/3D data presentation gives user option to quickly generate reports.