Film Thickness Mapping Tool SRM100

Thin Film Thickness Mapping Metrology SRM100 Reflectometer

Spectroscopic reflectometer mapping system (SRM) is used to obtain uniformity information of film thickness and their optical properties. By measuring reflection spectra (at normal incidence in most cases), film properties can be modeled with capable TFProbe software. If quick, routine, daily measurements on known films or simple film stack are needed in a low budget case, then SRM series is a good choice.

TFProbe series spectroscopic reflectometer mapping tools have many unique feastures, like long working distance, adjustable working distance, various stage  for different wafer size applications, selectable light source and adjustable light source intensity, etc.

Angstrom Sun Technologies Inc deliveres our Spectroscopic reflectometer mapping tools with advanced support, There have been many cases that customers upgrade simple SR model tool to SRM which has mapping capability.

 
Features:
  • Easy to set up and operate with Window based software
  • Various types of geometry substrate up to 300x300mm or 300mm in diameter
  • Various types of mapping pattern such as linear, polar, square or arbitrary coordinates
  • Advanced optics and rugged design for best system performance
  • Array based detector system to ensure fast measurement
  • Map film thickness and Refractive Index up to 5 layers
  • System comes with comprehensive optical constants database and library
  • Include commonly used recipes
  • Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
  • Upgradeable to MSP (Microspectrophotometer) mapping system with pattern recognition, or Large Spot for mapping over patterned or featured structure (with Zonerage Model)
  • Apply to many different type of substrates with different thickness
  • 2D and 3D output graphics and user friendly data management interface with statistical results
System Configuration:
  • Model: SRM100-M300
  • Detector: CCD Array with 2048 pixels
  • Light Source: High Power DUV and DC regulated Tungsten-Halogen
  • Light Delivery: Optics
  • Stage1: Black Anodized Aluminum Alloy Vacuum chuck holds 200 mm wafer
  • Communication: USB & RS232
  • Software: TFProbe 2.X/3.X
  • Measurement Type: Film thickness, reflection spectrum, refractive index
  • Computer: Intel Core 2 Duo Processor with 200GB Hard drive and DVD+RW Burner plus 19” LCD Monitor
  • Power: 110– 240 VAC /50-60Hz, 3 A
  • Dimension: 14”(W) x 20”(D) x 14”(H)
  • Weight: 100 lbs
  • Warranty: One year labor and parts
Specifications:
  • Wavelength range: 250 to 1050 nm
  • Spot Size: 500 µm to 5mm
  • Sample Size: up to 300 mm in diameter
  • Substrate Size: up to 50mm thick
  • Number of Layers*: Up to 5 films
  • Measurable thickness range*: 10 nm to 50 µm
  • Measurement Time: 2ms - 1s /site typical
  • Positional Repeatability: ~1 µm
  • Accuracy*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)
  • Repeatability*: < 2Å (1 sigma from 50 thickness readings at center for 1500 Å Thermal SiO2 on Si Wafer)
Options:
  • Additional Models with Wavelength Extension to DUV or NIR Range: SRM100D: 190nm - 850nm
    • SRM400: 900nm - 1700nm
    • SRM500: 400nm - 1700nm
  • Customized size: Available
  • Large Spot Accessories for featured structure measurement
  • Small spot accessories for highly non uniform samples
Applications:
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
  • Biological films and materials
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor compounds
  • Functional films in MEMS/MOEMS
  • Amorphous, nano and crystalline Si
Application Examples:
 
  • 2D thicknesses plot for Nitride layer in a three layer stack (Nitride-Oxide-Nitride on Glass)

  • 2D contour plot for Nitride layer in a three layer stack (Nitride-Oxide-Nitride on Glass)

Note:

  • System configuration and Specifications subject to change without notice
  • * Film property, surface quality and layer stack dependent
  • Customized system available for special applications
  • TFProbe is registered trademark of Angstrom Sun Technologies Inc.