Integrated In-line Metrology

In-line insitu real time monitoring tool for film thickness and color parameters

Although table-top version is our major product platform, we do provide in-line and in situ solutions. Although all in-line tools involve some special configuration and customized designs, we have had such experience to demo our capability in semiconductor, photovoltaic, glass industries. Both spectroscopic ellipsometer and spectroscopic reflectometers could be integrated for in-line or in situ application purpose. But how to implement them, or which one is more suitable, an environmental situation should be considered. You are welcome to discuss with our experts and we'll be glad to offer a real solution to meet your needs.