Spectroscopic Ellipsometer Microspectrophotometer SE-MSP

Spectroscopic Ellipsometer and Microspectrophotometer Integrated Thin Film Metrology

Angstrom Sun technolgies Inc provides a solution to work on ultra thin films with Ellipsometry and also a micron small area with micro-reflectometry, a unique configuration by combining ellipsometer and microspectrophtometers. TFProbe 3.3 version software will handle both measurements and analyses.

A small probing spot is desired for some applications, like features on MEMS or semiconductor product wafers. After microspectrophotometer is  integrated with spectroscopic ellipsometer, tool's capability is greatly extended. Model SE-MSP is designed for such purpose. MSP works under reflectometry mode and run measuremment at normal incident angle which is complimentary to non-normal incident angle SE setup.  Wavelength ranges for SE and MSP can be configured differently, based on application needs. All options are selectable.

 
Features:
  • Easy to operate with Window based software
  • Advanced optics design for best system performance
  • Automatically change incident angles at 0.001 degree resolution with SExxxBA options
  • High Power light source for broad band applications
  • Array based detector system to ensure fast measurement
  • Measure film thickness and Refractive Index for multiple layers, allow user to design model with unlimited layers
  • System comes with comprehensive optical constants database and library
  • Advanced TFProbe 3.3 Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
  • Three different user level control: Engineer mode, system service mode and easy user mode
  • Flexible engineer mode for various recipe setup and optical model testing
  • Robust one click button (Turn-key) solution for quick and routine measurement
  • Configurable measurement parameters, user preference and easiness of operation
  • Fully automatic calibration and initialization for system
  • Precise sample alignment interface from sample signal directly, no external optics needed
  • Precise height and tilting adjustment
  • Apply to many different type of substrates with different thickness
  • Various options, accessories available for special configurations such as mapping stage, wavelength extension, focus spot etc.
  • 2D and 3D output graphics and user friendly data management interface
  • Digital Imaging Tool for Micron region selection
  • Integrated Reflectometer for Reflection measurement over small region
System Configuration:
  • Model: SE-MSP
  • Detector: Detector Array
  • Wavelngth range can be configured from 190 to 1700nm
  • Light Source: Based on wavelength range for SE and MSP
  • Incident Angle Change: Automatic with Program setting
  • Stage: Manual or Automatic Mapping stage
  • Software: TFProbe 3.3
  • Combined SE and MSP
  • Computer: Intel i3 processor
  • Monitor: 22" Wide Screen LCD
  • Power: Universal 110– 240 VAC /50-60Hz, 6 A
  • Warranty: One year labor and parts
Specifications:
  • Spot Size: 1 to 5 mm variable for SE (beam size can be reduced with microspot option)
  • Incident Angle Range: 30 to 90 degree
  • Incident Angle Change Resolution: 0.001 degree with automatic goniometer or 5 degree step with manual goniometer
  • Digital Imaging: 1.3 MegPixels or better
  • Effective Magnification: 1200x
  • Long Work distance objective (12mm)
  • MSP Beam Size: adjustable 10 - 500 um
  • Sample Size: up to 300 mm in diameter
  • Substrate Size: up to 20mm thick
  • Measurable thickness range*: 0 nm to 50 µm
  • Measurement Time: ~ 1s/Site
  • Accuracy*: better than 0.25%
  • Repeatability*: < 1 Å (1 sigma from 50 thickness readings for 1500 Å Thermal SiO2 on Si Wafer)
Options:
  • Transmission Measurement Module
  • High resolution digital camera
  • Ultra Long work distance objective for MSP
  • Mapping X-Y Stage (X-Y mode, instead of Rho-Theta mode)
  • Heating /Cooling Stage
  • Vertical Sample Mounting Goniometer
  • Wavelength extension to further DUV or IR range
  • Scanning Monochromator Setup
Applications:
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
  • Forensics, Biological films and materials
  • Inks, Mineralogy, Pigments, Toners
  • Pharmaceuticals, Medial Devices
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor compounds
  • Functional films in MEMS/MOEMS
  • Amorphous, nano and crystalline Si

Note:

  • System configuration and Specifications subject to change without notice
  • * Film property, surface quality and layer stack dependent
  • Customized system available for special applications
  • TFProbe is registered trademark of Angstrom Sun Technologies Inc.