Spectroscopic Ellipsometer SE-Solar

Spectroscopic Ellipsometer for Solar Photovoltaic Application

Spectroscopic ellipsometer SE-Solar is designed for Photovoltaic(PV) application. It can be configured to cover DUV to NIR range with manual goniometer for incident angle changes at 5 degree interval or an automatic goniometer with 0.001 degree resolution.  Array based detecting setup gives user a fast measurement, just in seconds for each data. When a mapping or real time in situ measurement is needed, this is the best choice among all SE models. Wavelength range can be extended up to 1700nm if requested, as an option for some applications like CdTe, CIGS film characterization.  A tilting stage for measuring films on the textured mono wafers. Dependent on needs, a combined DUV and Vis-NIR light source or a single Arc Xenon light source is available for use. In the product photo, a 156x156mm motorized mapping stage is equipped. In addition, a reflectometer at normal incidence can also be integrated together. There are several other options available. Please fell free to contact us for any special needs. It's our goal to provide a tool, whatever it is standard configuration or it is customized,  to meet your application needs.

 
Features:
  • Easy to operate with Window based software
  • Advanced optics design for best system performance
  • High Power combined DUV-VIS light source or Xenon Arc light source for broad band applications
  • Array based detector system to ensure fast measurement
  • Measure film thickness and Refractive Index simultaneously
  • System comes with comprehensive optical constants database and library
  • Advanced TFProbe 3.3 Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
  • Three different user level control: Engineer mode, system service mode and easy user mode
  • Flexible engineer mode for various recipe setup and optical model testing
  • Robust one click button (Turn-key) solution for quick and routine measurement
  • Configurable measurement parameters, user preference and easiness of operation
  • Fully automatic calibration and initialization for system
  • Precise sample alignment interface from sample signal directly, no external optics needed
  • Precise height and tilting adjustment
  • Apply to many different type of substrates with different thickness
  • Various options, accessories available for special configurations such as mapping stage, wavelength extension, focus spot etc.
  • 2D and 3D output graphics and user friendly data management interface
System Configuration:
  • Model: SE-SR-Solar (Mapping stage is optional)
  • Detector: Detector Array
  • Light Source: High Power Combined DUV-Vis-NIR or Xenon Arc Light Source
  • Incident Angle Change: Manual
  • Stage: Automatic Mapping with X-Y configuration
  • Software: TFProbe 3.3
  • Computer: Intel i3 processor or better
  • Monitor 22" Wide Screen LCD
  • Power: 110– 240 VAC /50-60Hz, 6 A
  • Warranty: One year labor and parts
Specifications:
  • Wavelength range: 250 to 1100 nm or 370 to 1100nm (Up to 1700nm)
  • Wavelength resolution: 1 nm
  • Spot Size: 1 to 5 mm variable
  • Incident Angle Range: 0 to 90 degree
  • Incident Angle Change Resolution: 5 degree interval with manual goniometer or 0.001 degree with auto goniometer
  • Sample Size: up to 160x160 mm
  • Substrate Size: up to 20mm thick
  • Measurable thickness range*: 0 nm to 20 µm
  • Measurement Time: ~ 1s/Site
  • Accuracy*: better than 0.25%
  • Repeatability*: < 1 Å (1 sigma from 50 thickness readings for 1500 Å Thermal SiO2 on Si Wafer)
Options:
  • Transmission Measurement
  • Micro spot for measuring small area
  • Automatic Goniometer or manual goniometer for Incident angle changes
  • Other size or mode Mapping Stage
  • Heating /Cooling Stage
  • Wavelength extension to further DUV or IR range
  • Scanning Monochromator Setup
  • Combined with MSP for patterned sample measurement with digital imaging functions
  • Other Tilting accessories for special substrate applications
Applications:
  • Antireflection coatings, SiNx, SiOx..
  • CdTe, CIGS, CdS, Mo....
  • Amorphous, nano and crystalline Si
  • Various TCO films (ITO, FTO, IZO, AZO...)

 

Note:

  • System configuration and Specifications subject to change without notice
  • * Film property, surface quality and layer stack dependent
  • Customized system available for special applications
  • TFProbe is registered trademark of Angstrom Sun Technologies Inc.