Spectroscopic Reflectometer SR Series

Spectroscopic Reflectometer for Reflection, Transmission and Film thickness Measurement

Spectroscopic reflectometer (SR) series are relative low cost and easy to use tools. To enusre accurate measurement on spectra, a long working distance and also adjustable working distance set up are professionaly desgined and considered. Since reflection spectra measurments require to use known reference to calibrate light intensity, it is hard to image user could get accurate spectra without optimizing signal step during such calibration because reference thickness is different from sample substrate's thickness in most of cases. Adjusting power output to lamp is our another consideration in ensuring a good measurement by reducing non-linearity effect of the detector.

We have developed several version of software for spectroscopic reflectometers. TFProbe 2.4 works under Windows 32 Bit OS and TFProbe 2.5 is compiled for 64 bit OS window system. Both TFProbe 2.4 and TFProbe 2.5 have the similar user interface and users will have no hard time to get used to it. A more advanced version TFProbe 3.3 has also TFProbe 2.4 module integrated into it. As such, we have a complete solution for user to consider based on window's OS, advanced functionality and how simple user interface, like scientific mode or simple operator mode.....

With support in a more professional and advanced way, we offer spectroscipic ellipsometry technical support to our reflectometer users at no cost at all. With estabilished confidence in modeling with ellipsometry technique, you are able to obtain confident results at low cost!