Spectroscopic Reflectometer SR100

Spectroscopic Reflectometer SR100

Spectroscopic reflectometer is our simplest tools among our product lines. By measuring reflection spectra (at normal incidence in most cases), film properties can be modeled with capable TFProbe software. If quick, routine, daily measurements on known films or simple film stack are needed in a low budget case, then SR series are a good choice. If spectra is only of  interest, like monitoring antireflection (AR)  or high reflection devices' performace, then wavelength range will be most impotant factor in selecting tools. If user needs to determine films' thickness, the optical resolution of spectrometer will also be a factor to consider. We have broad configurations available and system can  be customized to meet your specific applications.

TFProbe series spectroscopic reflectometer tools have many unique feastures, like long working distance, adjustable working distance, large stage size, selectable light source and adjustable light source intensity, etc. Various easy add-on features are also available, like transmission, curved surface measurement adaptor, multiple channel, large or small beam setups, and so on.

Although there are several brands of spectrometer and spectrophotometers available in market, Angstrom Sun Technologies Inc deliveres our Spectroscopic reflectometer tools with advanced support. Since we also make advacned spectroscopic ellipsometer systems, we provide advanced modeling support with our advanced ellipsometer tools at no cost to our customers who need assistance when using reflectometer tools. There have been many cases that customers upgrade reflectometer  to ellipsometer by trading in basic model tools to meet their advanced application needs.

 
Features:
  • Easy to set up
  • Easy to operate with Window based software
  • Advanced optics design for best system performance
  • Array based detector system to ensure fast measurement
  • Measure film thickness and Refractive Index up to 5 layers
  • Allow to acquire reflection, transmission and absorption spectra in milliseconds
  • Capable to be used for real time or in-line thickness, refractive index monitoring
  • System comes with comprehensive optical constants database and library
  • Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
  • Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system, Multiple channel system, Large Spot for · direct measurement over patterned or featured structure
  • Apply to many different type of substrates with different thickness
  • Various accessories available for special configurations such as running measurement over the curve surface
  • 2D and 3D output graphics and user friendly data management interface
System Configuration:
  • Model: SR100R
  • Detector: CCD Array with 2048 pixels
  • Light Source: Combined High Power Deuterium and Halogen
  • Light Delivery: Fiber Optics
  • Stage: Black Anodized Aluminum Alloy with Easy Adjustment for sample height, 200mmx200mm size
  • Communication: USB with computer
  • Measurement Type: Film thickness, reflection spectrum, refractive index
  • Software: TFProbe 2.x
  • Computer needed: P3 above with minimum 50 MB space
  • Power: 110– 240 VAC /50-60Hz, 1.5 A
  • Warranty: One year labor and parts
Specifications:
  • Wavelength range: 250 to 1100 nm
  • Spot Size: 500 µm to 5mm
  • Sample Size: 200x200mm or 200 mm in diameter
  • Substrate Size: up to 50mm thick
  • Measurable thickness range*: 2 nm to 50 µm
  • Measurement Time: 2 ms minimum
  • Accuracy*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)
  • Repeatability*: < 1Å (1 sigma from 50 thickness readings for 1500 Å Thermal SiO2 on Si Wafer)
Options:
  • Transmission Fixture for Transmission and Absorption Measurement (SR100RT)
  • Micro spot for measuring small area down to 5 µm size (MSP100)
  • Multiple Channel for simultaneously measurement at multiple locations (SR100xX)
  • Mapping uniformity over 200 or 300 mm wafer (SRM100-200 /300)
  • Simple, low cost measurement stage is available
Applications:
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
  • Forensics, Biological films and materials
  • Inks, Mineralogy, Pigments, Toners
  • Pharmaceuticals, Medial Devices
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor compounds
  • Functional films in MEMS/MOEMS
  • Amorphous, nano and crystalline Si
  • Solor Cell Films
Application Examples:
 
  • Measured thickness for thin Al2O3 film

  • Measured Thickness for thick coating

  • Measured Reflection Spectra for optical Antireflection (AR) Coatings

Note:

  • System configuration and Specifications subject to change without notice
  • * Film property, surface quality and layer stack dependent
  • Customized system available for special applications
  • TFProbe is registered trademark of Angstrom Sun Technologies Inc.
  • Special configurations are available such as wavelength down to 225nm, 200nm or 190nm etc.....