Spectroscopic Reflectometer SR500

Spectroscopic Reflectometer Model SR500

Spectroscopic reflectometer is a low cost, optical solution for characterizing thin film thickness and their optical properties. Angstrom Sun Technologies Inc delivers modular like tools to customers for their current applications and possible furture application with added /extended wavelength range. Model SR500 is wavelength range extension for SR100 (which covers 250 to 1100nm wavelength range) to 1700nm. Wavelength range coverage is highly application oriented. For example, in telecommunication application, all bands (O bands: 1260-1360nm; E band in 1360-1460nm; S band in 1460-1530nm, C band in 1530 -1560nm, L band 1565-1625nm, U band in 1625 -1675nm) are in near infrared wavelength range. To evaluate components's performance, like antireflection coating's behavior in laser cavity, it is necessary to have such wavelength range covered . In photovoltaic area, many newly developed functions films/coating are absorbing in visible range, like Copper indium gallium (di)selenide (CIGS), it is only possible to measure their thickness in transparent wavelength range which is also in the NIR range.

 
Features:
  • Easy to set up
  • Easy to operate with Window based software
  • Advanced optics design for best system performance
  • Array based detector system to ensure fast measurement
  • Measure film thickness and Refractive Index up to 5 layers
  • Allow to acquire reflection, transmission and absorption spectra in milliseconds
  • Capable to be used for real time or in-line thickness, refractive index monitoring
  • System comes with comprehensive optical constants database and library
  • Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
  • Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system, Multiple channel system, Large Spot for · direct measurement over patterned or featured structure
  • Apply to many different type of substrates with different thickness
  • Various accessories available for special configurations such as running measurement over the curve surface
  • 2D and 3D output graphics and user friendly data management interface
System Configuration:
  • Model: SR500R
  • Dual Detectors: CCD Array for UV-Vis and InGaAs Detector Array for Near-Infrared (NIR)
  • Light Source: Combined Deuterium and Halogen
  • Light Delivery: Fiber Optics
  • Stage: Black Anodized Aluminum Alloy with Easy Adjustment for sample height, 200x200mm size
  • Software: TFProbe 2.4/2.5
  • Communication: USB
  • Measurement Type: Film thickness, reflection spectrum, refractive index
  • Computer needed: P3 above with minimum 50 MB space
  • Power: 110– 240 VAC /50-60Hz, 1.5 A
  • Warranty: One year labor and parts
Specifications:
  • Wavelength range: 250 to 1700 nm
  • Spot Size: 500 µm to 5mm
  • Sample Size: 200x200mm or 200 mm in diameter
  • Substrate Size: up to 50mm thick
  • Measurable thickness range*: 2 nm to 150 µm
  • Measurement Time: 2 ms minimum
  • Accuracy*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)
  • Repeatability*: < 1 Å (1 sigma from 50 thickness readings for 1500 Å Thermal SiO2 on Si Wafer)
Options:
  • Transmission Fixture for Transmission and Absorption Measurement (SR500RT)
  • Micro spot for measuring small area down to 5 µm size (MSP500)
  • Multiple Channel for simultaneously measurement at multiple locations (SR500xX)
  • Mapping uniformity over 200 or 300 mm wafer (SRM500-200 /300)
Applications:
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
  • Forensics, Biological films and materials
  • Medial Devices
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor compounds
  • Functional films in MEMS/MOEMS
  • Amorphous, nano and crystalline Si

Note:

  • System configuration and Specifications subject to change without notice
  • * Film property, surface quality and layer stack dependent
  • Customized system available for special applications
  • TFProbe is registered trademark of Angstrom Sun Technologies Inc.