Angstrom Sun Technologies Inc just introduced an economical low cost micropsectrophotometer eMSP set of tools for micron region spectrum and film thickness measurement, it has the same wavelength coverage as regular/standard micropsectrophotometers, using the same TFProbe software for data acquisition, simulation, modeling and more... Its unique design ensures university and small startups to spend less money and get the same level characterizations for thin films.


Easy to operate with Window based software, both 32bit and 64bit OS

Micron region measurement with live video for patterned structure surface

Array based detector system to ensure fast measurement

Affordable, portable and small footprint table top design

Measure film thickness and Refractive Index up to 5 layers over micron size region

Allow to acquire reflection, transmission and absorption spectra in milliseconds 

Capable to be used for real time spectra, thickness, refractive index monitoring

System comes with comprehensive optical constants database and library

Advanced Software allows user to use either NK table, dispersion or composite model (EMA) for each individual film

Integrated Vision, spectrum, simulation, film thickness measurement system

 Apply to many different type of substrates with different thickness up to 150mm size

 User friendly data management interface

 Imaging software for dimension measurement such as angle, distance, area, particle counting and more

Various options available to meet special applications

System Configuration:

 Model: eMSP100, eMSP300, eMSP400, eMSP450, eMSP500

 Detector: CCD Array and/or  InGaAs Array

Light Source: High Power Deutenium and/or Halogen lamp

Stage: Various Size with precision Z focus (fine and cause)

Objectives: available 4x, 10x, 20x, 40x, 50x

Communication: USB

Software: TFProbe 2.4 (upgradable to TFProbe 3.3)

Measurement Type: Reflection Spectra, Film thickness/refractive index and feature dimensions

Computer and Monitor: optional, both 32bit and 64bit OS

Power: 110– 240 VAC /50-60Hz, 3 A

Dimension: 20’x20’x20’ (Table top setup)

Warranty: One year labor and parts


Wavelgnth range: 200 to 1700nm (higher is also available)

Wavelgnth reolsution: typically <1nm for visible range and 3nm for NIR rnage

Spot Size: 10um (50x) and 50um (10x objective), other spot size is also available

Smaple Holder: 150x150mm

Substrate Thcikness: up to 50mm

Measurable thickness range*: 10nm to 100um or extended per specific configuration

Measurmeent time:  minimum 2ms


Add-on accessories for Transmission Measurement

Wavelength extension to DUV (eMSP500)

Higher power optics for smaller spot size

Customized configuration for special applications

Heating and Cooling Stage for kinetics study

Higher wavelength resolution down to 0.1nm

Various filters for special applications

Precision X-Y stage




Semiconductor fabrication (PR, Oxide, Nitride..)

Liquid crystal display (ITO, PR, Cell gap…..)

Forensics, Biological films and materials

Inks, Mineralogy, Pigments, Toners

Pharmaceuticals, Medial Devices

Optical coatings, TiO2, SiO2, Ta2O5…..

Semiconductor compounds

Functional films in MEMS/MOEMS

Amorphous, nano and crystalline films

Interface Example:


Application Examples:

640nm SiO2on Silicon Sample

Native Oxide

Si3N4 Sample

Digital Imaging Examples:




System configuration and Specifications subject to change without notice

* Film property, surface quality and layer stack dependent

Customized system available for special applications

TFProbe is registered trademark of Angstrom Sun Technologies Inc.