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TFProbe-Ellipsometer-for-Education-eSE

Angstrom Sun Technologies Inc is glad to introduce education version TFProbe eSE for Universities, start-ups and R&D users. It is affordable and true spectroscopic tool. It comes with advanced TFProbe 3.3 software for system configuration, data acquisition, simulation and regression. Different user log-in level allows Scientists/Engineers to play complicated layer stacks, isotropic/anisotropic, super-lattice, inhomogeneous with various index profile builder, while operator mode provides one-button click to have results, plus lifetime software upgrade without cost and professional application support....

 
Features:

· Specifically designed for education and small R&D activities

· Affordable but still advanced and powerful as those expensive tools

· True spectroscopic Ellipsometer (not single wavelength laser, not LEDs narrow band)

· Table top and Easy to set up, Plug and Play

· Easy to operate with all Window OSs

· Advanced optics design for best system performance

· Variable Angle from 45 to 90 degree range

· Long life (over 10000hrs) ultra stable Vis-NIR light source for broad band applications

· Array based detectors allow fast measurement

· Measure film thickness and Refractive Index for unlimited layers as long as it is feasible

· System comes with comprehensive optical constants database and model recipes

· Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.

· Apply to many different type of substrates with different thickness

· Free Life time software upgrade and application support

System Configuration:

· Model: TFProbe eSE100 or eSE300

· Detector: CCD Arrays for Fast measurement

· Light Source: Long Life high stable Tungsten-Halogen  light source for eSE300 or Combined Deuterium and Tungsten Halogen) for eSE100

· Software: TFProbe 3.3

· Angle Change: Manually

· Wavelength Scan: Automatic

· Stage: 150mm (6”) sample holder

· Precision X-Y-Z stage and 3 points tilting , 0 to 50mm Z range

· Measurement Type: Film thickness, refractive index, multiple layer

· Communication: USB (Computer and  monitor: Not Included but optional)

· Power: Universal 110– 240 VAC / 50-60Hz, 6 A

· Warranty: One year labor and parts or per agreement

Specifications:
  • Wavelength range: 370 - 1100 nm (Visible version eSE300) or 250 - 1100 nm (DUV-Vis version eSE100)
  • Wavelength resolution: better than 0.5 nm
  • Beam Size: 1 to 5 mm configurable
  • Sample Size: up to 200 mm
  • Measurable Thickness Range: up to 50 um for transparent coatings/films
  • Measurable layers: user definable (there is no limit in software setup)
  • Measurement time: typical 3 seconds, user definable
  • Variable incident angle: 45 to 90 degree at 5 degree preset interval
  • Thickness precision: 0.1 nm or 0.1% of film thickness
  • Index precision: 0.0001
Options:

Other wavelength range are available.

Microspots/Small Beam available.

Vision attachments available.

Motorized Mapping Stage available
 

Applications:

· Photoresist, polyimide, Oxides, Nitrides

· Optical coatings, TiO2, SiO2, Ta2O5…..

· Semiconductor compounds, Cell gaps

· Functional films in MEMS/MOEMS

· Thin film transistors (TFT) stack

· Conductive oxide: Indium Tin Oxide

· Coatings on medical devices

· Amorphous, nano and crystalline films

· Thin Metal Layers

· Solar Films: CIGS, CdTe…….

Note:

Footprint:

Educational Ellipsometer Footprint